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•Description: Crater defects in the LAM TEOS CVD process present yield and integration risks in high‑volume manufacturing. This project focuses on understanding crater defect mechanisms and driving defect reduction through data analysis and controlled process optimization in F10.•Scope: –Understand LAM TEOS CVD process flow and chamber condition–Analyze inline defect and yield data to characterize crater defects–Support limited experiments (DOE / split runs) under PEE gui...